Replication of optical microlens array using photoresist coated molds.
نویسندگان
چکیده
A cost reduced method of producing injection molding tools is reported and demonstrated for the fabrication of optical microlens arrays. A standard computer-numerical-control (CNC) milling machine was used to make a rough mold in steel. Surface treatment of the steel mold by spray coating with photoresist is used to smooth the mold surface providing good optical quality. The tool and process are demonstrated for the fabrication of an ø50 mm beam homogenizer for a color mixing LED light engine. The acceptance angle of the microlens array is optimized, in order to maximize the optical efficiency from the light engine. Polymer injection molded microlens arrays were produced from both the rough and coated molds and have been characterized for lenslet parameters, surface quality, light scattering, and acceptance angle. The surface roughness (Ra) is improved approximately by a factor of two after the coating process and the light scattering is reduced so that the molded microlens array can be used for the color mixing application. The measured accepted angle of the microlens array is 40° which is in agreement with simulations.
منابع مشابه
Concave Microlens Array Mold Fabrication in Photoresist Using UV Proximity Printing
This paper presents a simple and effective method to fabricate a polydimethyl-siloxane (PDMS) microlens array with a high fill factor, which utilizes the UV proximity printing and photoresist replication methods. The concave microlens array mold was made using a printing gap in lithography process, which utilizes optical diffraction of UV light to deflect away from the aperture edges and produc...
متن کاملA Surface Micromachined Optical Scanner Array Using Photoresist Lenses Fabricated by a Thermal Reflow Process
This paper presents the design, fabrication, and operation of a newly developed micromechanical optical scanner array using a translating microlens. We have used photoresist reflow techinique to form a microlens on a surface micromachined -stage of the scratch-drive actuation mechanism. The lens scanner is placed at the focal length from an incident optical fiber to collimate the transmitting l...
متن کاملFabrication of two-dimensional arrays of microlenses and their applications in photolithography
This paper describes several methods for the fabrication of microlenses, and demonstrates a lithographic technique that uses a microlens array to pattern the intensity of light incident on photoresist. Three different methods were used to fabricate microlenses: (i) self-assembly of transparent microspheres, (ii) melting and reflow of photoresist on glass substrates and (iii) self-assembly of li...
متن کاملPatterning flood illumination with microlens arrays.
We describe a convenient lithographic technique that can produce simple, repetitive micropatterns over large areas (several square centimeters). The technique uses an illuminated array of micrometer-scale lenses to generate an array of optical patterns in an image plane located within micrometer distances from the lens array. A layer of photoresist, placed in the image plane, records the patter...
متن کاملSequential shrink photolithography for plastic microlens arrays.
Endeavoring to push the boundaries of microfabrication with shrinkable polymers, we have developed a sequential shrink photolithography process. We demonstrate the utility of this approach by rapidly fabricating plastic microlens arrays. First, we create a mask out of the children's toy Shrinky Dinks by simply printing dots using a standard desktop printer. Upon retraction of this pre-stressed ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید
ثبت ناماگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید
ورودعنوان ژورنال:
- Optics express
دوره 24 9 شماره
صفحات -
تاریخ انتشار 2016